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March 3, 2026
First Characterization of Comb Drive Based Micro Mirror Arrays
MN
Mario Nitzsche
Fraunhofer Institute for Photonic Microsystems
AB
Anuroop Bajpai
Central Electronics Engineering Research Institute
PD
Peter Dürr
Sony Corporation (United States)
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Key Points
Micro mirror arrays can significantly enhance optical device capabilities and precision.
The study provides critical insights into the actuation mechanisms of comb drive systems within the arrays.
Characterization through experimental methods highlights the efficiency and performance metrics.
These findings may imply further development opportunities in MEMS (Micro-Electro-Mechanical Systems) technology.
Abstract
327
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Nitzsche et al. (Sun,) studied this question.
synapsesocial.com/papers/69a7616dc6e9836116a2f61d
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First Characterization of Comb Drive Based Micro Mirror Arrays | Synapse