Crystallization kinetics of TiO2 thin films: A comparative study of film deposition conditions

Key Points

• Crystallization kinetics vary greatly with different deposition conditions used for TiO2 thin films, affecting their properties.
• Key evidence from experiments shows notable differences in crystallization rates at various temperatures and pressures.
• Assessment using a comparative analysis of TiO2 thin films under varied deposition techniques highlights yield and performance.
• This study suggests optimized deposition conditions may enhance film quality, but further research is needed for practical applications.