Correction: Ye, G.; Yao, Z. Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. Micromachines 2025, 16, 450

Key Points

• Findings indicate improvements in understanding the dynamics of chemical mechanical polishing machines and their operational trajectory.
• The analysis provides insights into the relationship between trajectory and relative speed during the polishing process.
• Methodology involved detailed examination of machine behavior and performance under various operational conditions.
• Supports further advancements in microfabrication techniques using optimized polishing processes.