The milder synthesis and highly-efficient purification of tetrakis(dimethylamino)titanium with ultrahigh-purity for wafer-scale TiO2 film under atomic layer deposition

Key Points

• Efficient purification of tetrakis(dimethylamino)titanium enhances the quality of TiO2 films, aiding semiconductor manufacturing.
• The synthesis method showcases milder conditions, improving overall yield and process sustainability in materials science.
• Purified titanium compound supports atomic layer deposition, a key technique for creating advanced thin films.
• This method highlights potential advancements in scalable deposition techniques for high-purity materials.