Design, fabrication, and characterization of a novel cantilever-based PMUT incorporating a central spring-like folded beam with enhanced transmission performance for air applications

Key Points

• Enhanced transmission performance is achieved through the innovative folded beam design and cantilever structure.
• The cantilever-based PMUT demonstrates a significant improvement in efficiency, with testing showing an increase in output levels.
• Characterization of the PMUT reveals its potential applications in air-based technologies and sound generation.
• Design and fabrication processes highlight the necessity for precise engineering to optimize performance in intended environments.