Hydrogen depth profiling using 2D-ERDA with 100 keV 4 He + ion beams

Key Points

• Hydrogen depth profiles are effectively measured using 100 keV He+ ion beams, revealing distinct concentrations.
• The depth profiling technique successfully outlines hydrogen distribution, with implications for material studies.
• Assessment involved the use of 2D-ERDA, allowing for precise measurement of hydrogen levels at various depths.
• Findings support advances in material characterization techniques, particularly for layered materials.