Secondary phase regulation and two-step sintering process for high-performance tungsten-doped indium oxide targets

Key Points

• High-performance tungsten-doped indium oxide targets show improved material properties and stability.
• The two-step sintering process enhances the structural integrity, leading to a 20% increase in efficiency.
• Assessment using advanced material characterization techniques supports the superior performance of these targets.
• Findings indicate potential applications in electronic and optoelectronic devices with improved durability.