Three-dimensional simulation research on plasma uniformity engineering: diamond film uniformity regulation based on resonant cavity structural resonance design | Synapse
March 3, 2026Open Access
Three-dimensional simulation research on plasma uniformity engineering: diamond film uniformity regulation based on resonant cavity structural resonance design
Key Points
Diamond film uniformity is effectively influenced by resonant cavity design.
Simulation results indicate enhanced plasma uniformity across various configurations.
Analysis of resonance structures reveals optimal configurations for film application.
Implications support advancements in material engineering techniques for better film applications.