Nanoscale Localization Microscopy and Deterministic Lithography of Solid-State Quantum Emitters

Quantum emitters (QEs) in the solid state can be spatially aligned with nanostructures to increase the photon collection efficiency and radiative emission rate. In many promising material platforms, these QEs are randomly positioned over the sample area, necessitating precise mapping of the emitter location and subsequent agile lithography aligned with the source. We have developed a programmable confocal microscope system to localize QEs with subwavelength precision, and subsequently accurately define nanostructures around the emitters. We show that repeated sampling of emitter location relative to alignment markers can account for sample drift and localize the emitter position within a few tens of nanometers. We demonstrate the deterministic enhancement of the collected photon intensity by up to 84% for emitters embedded in a micropillar.