Modeling and application of compensator depolarization effects in Mueller matrix ellipsometer

Key Points

• Modeling shows how compensators affect depolarization in optical measurements, enhancing data precision.
• Depolarization effects were quantified, showing improvements up to 30% in measurement reliability under varied conditions.
• Assessment using Mueller matrix ellipsometry enables a detailed understanding of light interaction with materials.
• Findings highlight the importance of accurate modeling in ellipsometry, pointing towards better optical characterization.