Thick-PZT based MEMS resonant viscometer with silicon microneedle array for high-density driving force

Key Points

• The MEMS resonant viscometer shows promising results for fluid measurement efficiency with a silicon microneedle array.
• A key performance metric includes enhanced driving force capabilities, indicating better fluid dynamics assessment.
• Analysis employs a MEMS technology framework focused on optimizing fluid viscosity measurement through resonant mechanisms.
• Improved performance may facilitate advancements in microfluidics, highlighting the need for further practical applications.