This study demonstrates the use of coherence scanning interferometry for high-precision surface deviation measurements, focusing on differential topography analysis. Two approaches are explored: adaptive interferometry with automated sample alignment and a conventional method using 2D cross-correlation for topography evaluation. Using the Circle Hough Transform and piezo-actuated positioning systems, precise sample alignment is achieved, significantly improving measurement accuracy and reducing the time-consuming manual alignment process. For surfaces with complex structures, such as grating imprints, the 2D cross-correlation method effectively determines lateral shifts and differential topographies. The results demonstrate that both methods are effective in identifying and quantifying surface deviations, offering a robust solution for quality control in mass production scenarios.
Stelter et al. (Tue,) studied this question.