Pneumatic actuators have several advantages for industrial applications, such as a high power-to-weight ratio and low heat generation in repeated operation, which is a significant problem for electric motors. However, due to the compliant characteristics of the servo system caused by air compressibility, it is easily affected by frictional forces during position control, making it unsuitable for high-precision applications. Ultra-high precision positioning technology has the potential to widely apply pneumatic actuators in precision work and lead to industrial breakthroughs. In this study, we propose a nanometer-order positioning technology using a practical general-purpose pneumatic actuator sealed with a common rubber gasket, and verify the possibility of industrial application through several experiments.
TAKAIWA et al. (Wed,) studied this question.