A comprehensive (experimental and model) study of the composition of the neutral and charged components of SF + He + O plasma was carried out with varying He/O ratio. Key processes that form stationary concentrations of fluorine and oxygen atoms under conditions of excess fluorine-containing particles were identified. It was shown that the corrected (refined based on the results of recent studies and supplemented with previously unaccounted for processes) kinetic scheme ensures satisfactory agreement between the calculated atomic concentrations and the values obtained from the results of optical-spectral diagnostics of the plasma.
Myakonkikh et al. (Wed,) studied this question.