Using the Ritz method, the maximum membrane deflection and the magnitude of mechanical stresses were calculated depending on the geometric dimensions of the membrane and the parameters of the deposited SiO layer. A comparative assessment was made of the magnitude of deformation and mechanical stresses in the structure of an absolute pressure transducer with a polysilicon membrane radius of 50 μm and a sandwich structure of a MEMS acoustic pressure transducer consisting of polysilicon layers and deposited SiO with a membrane radius of 300 μm, arising during the deposition of the SiO layer.
Amelichev et al. (Wed,) studied this question.
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