The analysis of the results of structural studies using X-ray and electron microscopic diagnostics of NiO films obtained by magnetron sputtering is carried out. The difference in the phase and structural composition of films of different thicknesses before and after annealing is shown. The reasons for these differences are discussed, as well as the role of the interface layer for obtaining stable nanoscale NiO films on sapphire substrates.
Pashaev et al. (Wed,) studied this question.