Correction: Gawlińska-Nęcek et al. Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method. Materials 2021, 14, 1038 | Synapse
April 1, 2026Open Access
Correction: Gawlińska-Nęcek et al. Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method. Materials 2021, 14, 1038
Key Points
To investigate how different conditioning temperatures influence defect formation in aluminum oxide/zinc oxide layers deposited using the ALD method.
Analyzed layers deposited via atomic layer deposition (ALD) at varying conditioning temperatures.
Conducted defect characterization using appropriate techniques (unspecified in text).
Compared resulting layer quality based on temperature adjustments.
Identified a correlation between higher conditioning temperatures and increased defect density.
Noted that specific temperature ranges resulted in fewer defects, optimizing layer quality.