This paper contains an overview of fabrication methods used for the construction of different microfluidic devices, along with some example applications. All the different procedures, methods, and their respective variants are collectively referred to as microfabrication methods. Microfabrication plays a crucial role in microfluidics, as the fabrication method directly influences the potential application of a device. The overview of fabrication methods can be categorized based on the mechanical properties of the materials used. In this context, the primary mechanical property considered is material rigidity, classifying materials into hard, plastic and soft categories. Other mechanical properties affect the possibility of use in extreme temperatures (hot or cold), reactive or neutral environments, and one of the most critical characteristics of microfluidic devices - biocompatibility. Some of the most widely used methods discussed in this paper include photolithography and its variants, etching technique for silicone and glass, PDMS molding, micro milling, and 3D printing. Additionally, paper-based microfluidics is highlighted as an excellent example of biocompatible microfluidic devices applied in medical applications.
Kozomora et al. (Wed,) studied this question.