The study aims to explore the feasibility of using κ-phase In2Se3 transistors as a scalable platform for logic integration in semiconductor applications.
Evaluated the performance of κ-phase In2Se3 transistors for semiconductor logic capabilities.
Assessed compatibility with back-end-of-line (BEOL) processes.
Implemented wafer-scale fabrication techniques.
Demonstrated improved uniformity and scalability of non-ferroelectric κ-phase In2Se3 transistors.
Showed effective integration with existing BEOL-compatible systems.
Abstract
as a scalable 2D semiconductor platform for BEOL-compatible logic integration.