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April 17, 2026Review of Scientific Instruments

Frequency-response-data-based optimization of the controller for a compound dual-stage nano-positioning system

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Authors

QYQi YuHWH WuZHZhihan Hong

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Overview

Proposes a new design method to enhance control performance in a dual-stage nano-positioning system, indicating improved tracking accuracy.

Key Points

  • The aim is to optimize the controller for a compound dual-stage nano-positioning system using frequency response data.
  • Proposed a frequency-response-data-based optimization method for controller design.
  • Conducted a Nyquist stability analysis during the design process.
  • Formulated the controller design as a constrained optimization problem.
  • Performed comparative experiments on a dual-stage nano-positioning system.
  • Reduced the root-mean-square tracking error from 70.6 nm to 21.3 nm.
  • Achieved improved performance at 50 Hz sinusoidal tracking.
  • Demonstrated clear superiority of the proposed approach over the baseline integral controller.

Cite This Study

Yu et al. (2026) studied this question.

synapsesocial.com/papers/69e1cecc5cdc762e9d857d86https://doi.org/10.1063/5.0314722
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