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Patterns fabricated with Au nanoparticles (Au NPs) exhibit significant potential in fields such as micro-optics and bioelectronics. However, the current manufacturing methods still suffer from complex processes and low efficiency. In this work, we propose a high-speed manufacturing method for Au micro-/nanostructures based on spatiotemporal focusing and maskless lithography, achieving a throughput of 0.5 mm
Fu et al. (2024) studied this question.