In order to improve the stability and consistency for the surface temperature rise of heating suction cup about silicon carbide wafer, the study adopts the special suction cup based on metal oxide conductive coating heating. It puts forward the feedforward decoupling of Smith fuzzy multi-level integral separation PID based on the four-region temperature control system, which improves the problem about the non-uniformity for the surface temperature rise of heating the special suction cup due to the coupling interference between each region. First, a mathematical model of the temperature control system is established based on the heating structure and heat transfer mechanism of the special sucker. Then, Smith fuzzy multi-level integral separation PID simulation models with and without the feedforward decoupling algorithm are built, and comparative experiments are carried out, with stability analysis conducted using Bode plots. Afterwards, experimental tests are performed on the field of the special sucker temperature control system built on the basis of a PLC controller. Both simulation and test results show that the proposed control algorithm effectively solves the problem of uneven surface temperature of the special sucker and achieves robust temperature control based on the feedforward decoupling algorithm.
Fan et al. (Thu,) studied this question.