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February 5, 2026Micromachines0 citationsOpen Access

Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition

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ZDZhi-Xuan DaiTOTakahito OnoCDChing-Liang Dai

Key Points

  • The aim is to highlight the recent developments in MEMS and NEMS technologies and their applications.
  • Review advancements in MEMS and NEMS technologies
  • Discuss applications in intelligent sensing
  • Analyze trends and future directions in the field
  • Identified rapid developments in MEMS and NEMS
  • Highlighted the significance of these devices in sensing applications
  • Outlined potential future advancements and challenges

Abstract

Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have experienced rapid and sustained development in recent years and have become key enabling technologies for intelligent sensing ...

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Cite This Study

Dai et al. (2026) studied this question.

synapsesocial.com/papers/6984345ff1d9ada3c1fb25c4https://doi.org/10.3390/mi17020205
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