We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried platinum (Pt) bottom electrode, positioned above an acoustic Bragg reflector composed of alternating SiO2 (28.2 nm) and Ta2O5 (24.3 nm) layers in 8.5 pairs. The Bragg reflector and piezoelectric stack above are designed to confine a third-order thickness-extensional bulk acoustic wave mode, while efficiently transducing with thickness-field excitation. The fabricated SMR exhibits an extracted piezoelectric coupling coefficient (k2) of 0.8% and a maximum Bode quality factor (Q) of 51 at 63 GHz, representing the highest operating frequency reported for an SMR to date. These results establish a pathway toward mmWave SMR devices for filters and resonators in next-generation RF front ends.
Building similarity graph...
Analyzing shared references across papers
Loading...
Yinan Wang
Byeongjin Kim
Nishanth Ravi
Applied Physics Letters
University of California, Los Angeles
The University of Texas at Austin
Northeastern University
Building similarity graph...
Analyzing shared references across papers
Loading...
Wang et al. (Mon,) studied this question.
www.synapsesocial.com/papers/69a75a89c6e9836116a207c6 — DOI: https://doi.org/10.1063/5.0306947
Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context: