Sputtered TiAl-Monolayers: Optimization of Thickness Uniformity and Stress over Target Lifetime

Key Points

• Improved thickness uniformity significantly enhances the mechanical performance of the TiAl-monolayers.
• Stress stability optimization was observed across various thickness ranges during the assessments.
• Experimental analysis involved systematic testing to determine effective thickness and stress levels in monolayers.
• Findings imply potential for prolonged material lifetimes under operational conditions, highlighting the importance of these parameters.

Abstract