Sputtered FeCoB Soft Magnetic Thin Films for Surface Acoustic Wave Sensors

Key Points

• Sputtered FeCoB films significantly improve surface acoustic wave sensor responsiveness.
• Key metrics include enhanced sensitivity and lowered detection limits in the sensor configuration.
• The analysis employs sputtering techniques to create thin films with optimized magnetic properties.
• These findings highlight the potential for commercially viable sensor technologies based on advanced film materials.

Abstract