Surface photovoltage spectroscopy for the evaluation of oxidation processes in the microelectronic industry

Key Points

• Surface photovoltage spectroscopy reveals critical insights into oxidation processes.
• Analyzing surface photovoltage changes helps understand microelectronic material stability.
• This observational analysis focuses on oxidation processes relevant to the microelectronic industry.
• The findings may enable improved methods for evaluating semiconductor materials' properties.

Abstract