Investigation of TiO₂ seed layer engineering for improved remanent polarization uniformity, TDDB reliability, and dipole switching in La-doped ferroelectric HZO MFM devices

Key Points

• Improved remanent polarization uniformity enhances device performance and reliability.
• The engineered TiO₂ seed layers provide consistency in polarization across devices.
• Analysis focuses on TDDB reliability connected to dipole switching behaviors.
• Findings highlight the importance of device engineering in enhancing ferroelectric properties.