Investigation of convex/concave channel shaping with confined charge trap nitride for high-reliability 3D NAND flash applications

Puntos clave

• Enhanced reliability demonstrated in 3D NAND flash utilizing confined charge trap nitride designs, leading to improved performance.
• A significant performance increase within confined charge trap nitride structures was observed, particularly in high-reliability applications.
• Assessment involved channel shaping techniques, specifically convex and concave configurations to optimize performance.
• Findings highlight the potential for increased durability in NAND flash technology, underscoring the importance of channel design.