PulseExploreJournal ClubDebatesTrendingResearchersJournals
Instagram
HomeExploreJournal ClubTrending
Synapse
⌘+K
Synapse
March 5, 2026EDFA Technical Articles0 citations

A Step Toward Automation in Failure Analysis by FIB-SEM 3D Tomography and AI Segmentation

View Full Paper
PLPascal LimbeckerRWRong WuTWThomas Woyack

Key Points

  • The aim is to explore automation methods for defect detection using FIB-SEM 3D tomography and AI segmentation.
  • Utilized FIB-SEM for virtual slicing in multiple directions.
  • Implemented AI segmentation for dataset post-processing and visualization.
  • Developed automated defect detection processes.
  • Automated processes improve defect interpretation accuracy.
  • Resource savings are achieved through enhanced tool utilization.

Abstract

Abstract This article looks at ways to automate FIB-SEM slice and view, dataset post-processing and visualization, and automated defect detection. Virtual slicing in all directions, especially in the top-down view, facilitates the interpretation of defect types and the identification of root causes. Automated slice and view capabilities can save resources and maximize tool utilization.

Ask AI
Helpful
Bookmark
Share
View Full Paper

Cite This Study

Limbecker et al. (2026) studied this question.

synapsesocial.com/papers/69a91e1fd6127c7a504c1b5ehttps://doi.org/10.31399/asm.edfa.2026-1.p003
Ask AI
Helpful
Bookmark
Share
View Full Paper