Diamond-Like Carbon (DLC) film, which is one of the inorganic carbon materials can be joined by infrared laser irradiation. Since optical emission of plasma plume is observed during the joining, the mechanism of the joining may be decomposition and recombination of DLC films. In this study, DLC film on silicon or silicon without film, and DLC film on glass or glass without film were prepared, and these samples of silicon and glass were placed with films between them and irradiated with a laser from the glass side. Simultaneously, the optical emission spectra during the laser irradiation were measured. It was shown that a plasma plume during the irradiation contained the emission from carbon and related species. This result indicated that the DLC film temporary decomposed and recombined to join the films. Furthermore, it was found that DLC films could be joined not only to other DLC films but also to silicon by infrared laser irradiation.
Hase et al. (Wed,) studied this question.