The first results of combined deposition of coatings from a beam of accelerated C fullerene ions and fluoroplastic vapor (polymetrized tetrafluoroethylene, PTFE) are presented. The coatings were formed by condensation of thermally evaporated PTFE on a Si substrate in vacuum under irradiation with a C ion beam with an energy of 5 keV, passed through a mass spectrometer. The calculated ratio of C ions and molecular fragments condensing on the substrate (–CF–CF–) was chosen close to 1:1. The structure and chemical bonds have been studied by Raman scattering and X-ray photoelectron spectroscopy, according to which the coating contains about 8.6 at. % fluorine. The coating contains ~35% sp bonds, with a sp/sp ratio of ~0.76, and the main part (up to 50%) of fluorine–carbon bonds is concentrated in the form of polymer chains –CF–CF–, which are located in a solid carbon matrix, that is, the coating structure is nanocomposite. Mechanical tests showed high hardness of the coating H~32 GPa with an H/E ratio of ~0.16 (E is Youngs modulus). The coating is characterized by a high contact angle of wetting with distilled water (CA = 98°). Tribological tests showed a coefficient of friction close to 0.18, with low wear of less than 10 mm/N m.
Pukha et al. (2025) studied this question.