The behavior of Raman spectra of titanium foils after their fluorination was studied. It is shown that the bands at 905, 1795 and 2680 cm−1 belong to fluorine located under the titanium oxide nanofilm. Contact of fluorinated foils with humid air leads to a decrease in the intensity of these bands. At the same time, the bands of titanium oxynitrides and oxyfluorides appear and increase.
Drozdova et al. (Wed,) studied this question.