Priority of Dissipative Structures Formation during Si Surface Sputtering

The results on a study of the dissipative structures dynamics formed during surface sputtering by an ion beam are presented. Within a nonlocal model of surface erosion, the stability of equilibrium states: horizontal surface, wavy and terraced relief is investigated. It is shown that the stability of the equilibrium states is determined by the dimensionless parameter ε, which has the meaning of a generalized diffusion coefficient. Its critical values are determined for the equilibrium states such as horizontal surface, wavy and terraced relief. It is shown that the formation of wavy and terraced relief occurs as a result of the stability loss by the horizontal surface and its transition to a more stable state. The sequence of transitions between equilibrium states is determined by the corresponding critical values.