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Wireless surface acoustic wave (SAW) sensors hold great promise for in-situ, real-time monitoring and accurately assessing the health status of hot-end components. However, the thin-film electrode as the SAW sensor core unit with excellent high-temperature conductivity, stability, and oxidation resistance is still a challenge, especially in ultra-high temperature harsh environments. Herein, we employed polymer-derived ceramic approach to fabricate smooth and dense SiHfBCN ceramic coating on the YCa4O(BO3)3/BN substrate. The composition, microstructural evolution, and room temperature and high-temperature electrical conductivity of SiHfBCN ceramic coatings were investigated to reveal the mechanism for controlling electrical conductivity. The results indicate that the electrical conductivity of the SiHfBCN ceramic coating pyrolyzed at lower temperature of 1200 °C reaches an impressive high value of 291.55 S·m-¹ at 1200 °C in argon. Importantly, the result also demonstrates that the coating has remarkable high-temperature conductivity, excellent repeatability and durability. Therefore, the SiHfBCN ceramic coatings exhibiting typical semiconducting behavior highlights their potential as the thin-film electrode of SAW high-temperature sensors in high temperature extreme environments.
Dong et al. (2024) studied this question.