Capacitive micromachined ultrasonic transducers (CMUTs) have been developed over the past 30 years and achieved practical applications in both medical imaging and industrial non-destructive testing. This article presents the fundamental principles of CMUTs and surveys fabrication technologies, offering a comprehensive review of major advances and challenges in medical ultrasound and photoacoustic imaging applications. The article further reviews and analyzes three primary challenges currently confronting CMUTs in medical imaging applications: lower output acoustic pressure, dielectric charging effects, and the need for high bias voltage. It also presents and discusses a potential combined approach to comprehensively address these challenges, with the aim of enhancing CMUT performance and broadening clinical adoption.
Yu et al. (Thu,) studied this question.