MEMS-metasurface integration for light scanning and 3D LiDAR imaging

LiDAR (Light Detection and Ranging) is a critical imaging technology providing quantitative three-dimensional information to autonomous vehicles and robotic systems. Here, we demonstrate a compact, low-cost LiDAR imaging system that combines a microelectromechanical systems (MEMS)-mounted mirror with an optical metasurface to achieve wide-angle beam scanning with a field of view of up to 90°. Our system achieves a ranging accuracy of ±2.7 cm and captures 100 × 100 pixel images at frame rates up to 18 frames per second using MEMS-resonant scanning. The integration of metasurface technology with a MEMS device offers a highly scalable and promising approach to imaging for autonomous vehicles and logistics applications.