Multi-Wavelength Interferometric Absolute Distance Measurement and Dynamic Demodulation Error Compensation

This paper presents an absolute distance measurement system based on three-wavelength synchronous phase-shifting interferometry. A synthetic wavelength chain is established using three semiconductor lasers in an all-fiber Fizeau interferometer. By integrating a piezoelectric transducer (PZT)-driven sinusoidal phase modulation with multi-channel synchronous sampling for phase demodulation, and further combining it with a fractional multiplication method, the proposed system achieves high-precision absolute distance measurement over an extended range. Experimental results demonstrate an unambiguous measurement range of 240 μm, a static measurement precision better than 0.6 nm, and a dynamic displacement measurement accuracy superior to 2 nm in comparison with the reference device. The main error sources of the system, including synthetic wavelength uncertainty, phase measurement uncertainty, and air refractive index uncertainty, are systematically modeled and analyzed. In addition, the influence of dynamic factors, such as PZT nonlinearity, is discussed and compensated. The proposed method provides a robust and high-precision solution for absolute ranging and shows strong potential for applications in industrial precision inspection and optical sensing.