Microstructured Tactile Sensors With Bismuth Telluride Coatings for Vibration Detection

ABSTRACT Although real‐time vibration monitoring is crucial to ensure equipment reliability and implement predictive maintenance, it remains challenging to monitor broadband vibration using a single sensor precisely. This study demonstrates a high‐performance piezoresistive vibration sensor (PVS), in which the functional layer of thermoelectric P‐type bismuth telluride (Bi 0 . 5 Sb 1 . 5 Te 3 ) is deposited on a polydimethylsiloxane (PDMS) microstructure substrate. PVS exhibits excellent sensing performance, including a high sensitivity (S = 0.24 kPa −1 ), fast response and recovery time (153, 120 ms), and outstanding durability (∼10 000 cycles). The sensor can detect vibration frequencies ranging from 1 to 90 Hz and demonstrates practical applications of refrigerators, vacuum pumps, and crucible furnaces, indicating extensive industrial potential. Notably, the sensor's capabilities extend beyond machinery to biomedical applications, where the flexible and wearable device can detect human physiological activities, including pulse waveforms and body movements. By integrating scalable fabrication techniques with a cost‐effective material system, this work demonstrates broad market prospects in wearable electronics and human‐computer interfaces.