Multi-parameter tuning and aN/√Hz high-sensitivity force sensing based on arrayed graphene optomechanical resonators

While graphene membrane resonators show great promise for weak-force sensing, their sensitivity is often constrained by fixed device geometries and operating environments. In this work, we develop an all-optical interferometric system with integrated photothermal actuation to systematically explore these limits. Under high-vacuum and cryogenic conditions, a self-built optical readout scheme is employed to investigate how device size, temperature, and optical power affect the resonator’s dynamic response at the thermomechanical noise limit. The device achieves a force sensitivity of 5.04 × 10 −18 N/√Hz over a bandwidth of 22 kHz. This work reveals the underlying multiphysics coupling in graphene resonators through an all-optical measurement platform and provides a foundation for the design of high-performance nanomechanical force sensors, with potential applications in quantum sensing and precision optical metrology.