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May 28, 2026ENLIGHTEN (Jurnal Bimbingan dan Konseling Islam)0 citationsOpen Access

RF-Sputtered CoFeB Films with Switch-Like Magnetic Response for Wireless Power Transmission in Implantable Devices

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LMLaura Mazón‐MaldonadoRPR. ParviziHHHadi Heidari

Key Points

  • The aim is to investigate how film thickness, magnetic field application, and substrate roughness affect the magnetic properties of CoFeB films.
  • CoFeB thin films were deposited with varying thicknesses.
  • Films were characterized using COMSOL modeling, vibrating sample magnetometry (VSM), and magnetic force microscopy (MFM).
  • The influence of substrate roughness and magnetic field application during deposition on magnetic properties was analyzed.
  • Increasing film thickness improved magnetic properties and uniaxial magnetic anisotropy.
  • Application of a magnetic field during sputtering enhanced the properties of films at 226nm thickness.
  • 100nm films on rough PET substrates significantly altered the material's ferromagnetism.

Abstract

CoFeB is a bioinert soft magnetostrictive material, with a switch-like behaviour, useful as transducers for implanted medical devices and wireless power transmission. CoFeB thin-films were investigated in order to determine the influence of three key parameters: film thickness, the application of a magnetic field during deposition, and substrate roughness. CoFeB layers were deposited with different thicknesses and characterised by COMSOL modelling, vibrating sample magnetometry (VSM) and magnetic force microscopy (MFM). A general improvement in magnetic properties was observed by increasing the film thickness, concurrently to a decrease of the boron content, which increased the uniaxial magnetic anisotropy. An enhancement was observed too by the application of a magnetic field for the sputtering of films of 226nm. Notably, 100nm films deposition on rough PET substrates was found to be the most impactful factor in altering the material's ferromagnetism.

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Cite This Study

Mazón‐Maldonado et al. (2026) studied this question.

synapsesocial.com/papers/6a17da9b3fad632b0f9d79bfhttps://doi.org/10.1109/tmag.2026.3696428
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