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May 29, 2026Advanced Intelligent Systems0 citationsOpen Access

Tandem Neural Network Rapidly Solves Multivalued Inverse Problems: Application to Oxide‐Semiconductor Characterization

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MKMasatoshi KimuraKIKeisuke IdeKZKuan‐Ju Zhou

Key Points

  • This research aims to address non-unique solutions in inverse analysis of semiconductor devices through a tandem neural network.
  • Coupled pretrained forward and inverse models in a tandem neural network framework.
  • Trained on 1000 simulated transfer curves covering six intrinsic material parameters.
  • Evaluation of the network's performance on current-voltage characteristics of lab-fabricated devices.
  • Achieved parameter inference from a single current-voltage curve in less than 1 ms with R 2 = 0.99.
  • Inferred parameters matched experimental characteristics without additional fitting.
  • Significantly accelerated analysis compared to traditional TCAD iterative fitting.

Abstract

Inverse analysis of semiconductor devices often suffers from non‐unique solutions, known as multivaluedness, within a large‐scale parameter space. Here, we show that a tandem neural network (tandem NN), which couples a pretrained forward model to an inverse model and jointly minimizes prediction and reconstruction losses, overcomes this challenge for amorphous In–Ga–Zn–O thin‐film transistors. Trained on 1000 simulated transfer curves covering six intrinsic material parameters varied across ranges three to five orders of magnitude wider than in previous studies, the network infers multiple physical parameters from a single current–voltage curve in less than 1 ms with R 2 = 0.99. The inferred parameters reproduce experimental current–voltage characteristics of lab‐fabricated devices without additional fitting, confirming physical validity. Compared with conventional TCAD iterative fitting, the tandem NN provides significant acceleration and paves the way for autonomous experimentation for materials discovery, digital‐twin frameworks in next‐generation transistor manufacturing, and other multivalued inverse problem domains.

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Cite This Study

Kimura et al. (2026) studied this question.

synapsesocial.com/papers/6a192e39fab5b468c44172b2https://doi.org/10.1002/aisy.70437
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