In this study, FeCoNiAlTiNb HEA was fabricated and studied in thin film form for their heat-treatment effect. After heat treatment, all films still exhibit mainly smooth morphologies. The XRD patterns of heat-treated films show a small distinct peak at around 12 degree which indicate crystalline structure rather than amorphous structure of as-deposit films. According to JCPDS analyzing, the peak might be ascribed to AlCo alloys segregation. These segregations were deduced to be quite scattered and small in volume based on EDS mapping. The EDS composition analysing results reveal higher magnetic elemental proportion (Fe, Co and Ni) while increasing film thickness and conducting heat treatment, respectively. These higher magnetic elemental proportion indicates better magnetic properties.
Tsai et al. (Mon,) studied this question.