周期性光学薄膜应力建模

Key Points

• The established residual stress model achieves approximately 30% error compared to measured stress values, indicating high precision.
• Stress modeling is based on structural reconstruction of periodic multilayer films relevant to optical devices.
• The model relates residual stress to central wavelength, single-period stress, and periodicity parameters, enhancing understanding of film behavior.
• Testing involves using substrate deformation methods to validate estimations against real measurements in optical applications.

Abstract