Study of the Nonlinear Squeeze Film Damping Effects on a Lumped Parameter Model of a Mems Microspeaker

Miniaturized micro-electromechanical (MEMS) speakers for in-ear audio applications are a current development trend. If a transducer shrinks to a size that fits on a microelectronic chip, its physics differs in part from the macroscopic world and some of the common assumptions can be violated. In the case of MEMS micro-speakers, one of these effects is the nonlinear squeeze film damping. Understanding this effect is crucial for audio applications as there are strict limits on the allowable harmonic distortion caused by nonlinear forces in loudspeakers. In this work, we discuss the respective nonlinear effects of the squeeze film damping within a lumped parameter model.