Atomic Layer Deposition of Molybdenum Carbide and Substrate-dependent Reduction to Metallic Molybdenum

Key Points

• This research aims to explore the process of atomic layer deposition of molybdenum carbide and its subsequent reduction to metallic molybdenum.
• Utilized atomic layer deposition to create molybdenum carbide thin films.
• Investigated different substrate materials to assess reduction efficiency.
• Analyzed the properties of the resulting metallic molybdenum.
• Successfully deposited uniform layers of molybdenum carbide.
• Demonstrated effective reduction to metallic molybdenum on specific substrates.
• Highlighted substrate influence on the reduction process.

Abstract