Underwater Acoustic Target Detection Using a Miniaturized MEMS Hydrophone Array

Sonar is a fundamental tool for underwater target detection. However, conventional detection systems often suffer from poor sensor consistency and high fabrication costs. More critically, for low-frequency operation, the required array aperture becomes prohibitively large, limiting their deployment on small, mobile underwater platforms. To address the demand for compact, high-performance sensing solutions, this paper presents a miniaturized Micro-electromechanical Systems (MEMS) hydrophone array designed for underwater target detection. The array consists of six elements with a spacing of 0.25 m. Each element is approximately 22 mm in diameter and encapsulated in polyurethane via a casting and curing process. The core sensing element, a MEMS acoustic pressure hydrophone, exhibits a sensitivity of −177.2 ± 1.5 dB (re: 1 V/µPa) across the 20 Hz to 4 kHz frequency range and a noise resolution of approximately 59.5 dB (re: 1 µPa/√Hz) at 1 kHz. A key challenge in array-based detection is the phase mismatch among acquisition channels, which degrades algorithm performance. To mitigate this, we propose a phase self-correction method based on interleaved ADC acquisition control, enabling synchronous multi-channel sampling and effectively eliminating system-level phase errors. Furthermore, to overcome the inherent aperture limitations of conventional beamforming (CBF) applied to a miniaturized array, a differential beamforming (DBF) algorithm is adopted. This approach is less frequency-dependent and can approximate a frequency-invariant beam pattern, making it well-suited for miniaturized arrays. Simulation results confirm the theoretical validity of the DBF algorithm for the proposed MEMS hydrophone array. Sea trial data further demonstrate that this method achieves higher target detection accuracy compared to CBF techniques.