Reactive sputtered Zn 3 N 2 –CN x hybrid films for silicon heterojunction photodetection

Key Points

• This research aims to evaluate the efficacy of Zn3N2-CNx hybrid films in enhancing silicon-based photodetection.
• Utilized reactive sputtering to create Zn3N2-CNx hybrid films.
• Conducted performance assessments on silicon heterojunction devices using these films.
• Demonstrated improved photodetection performance with Zn3N2-CNx films compared to traditional materials.
• Achieved significant enhancements in optical response characteristics.

Abstract